OLED Equipment
Evaporator : 在AMOLED用Glass上蒸镀Pre-treatment、有机物及金属的设备
Key Feature
- Glass size : 100x100, 200x200, G4, G6H, G8.5
- System configuration : Pre-treatment, Organic, Metal, Flipper
- Key technology : Source, Precision Aligner, Auto feeder
- Thickness uniformity : Organic ≤3%, Metal ≤4%
- Align accuracy : Precision ≤±3㎛, Mechanical ≤±150㎛